JPS5440452Y2 - - Google Patents
Info
- Publication number
- JPS5440452Y2 JPS5440452Y2 JP17852276U JP17852276U JPS5440452Y2 JP S5440452 Y2 JPS5440452 Y2 JP S5440452Y2 JP 17852276 U JP17852276 U JP 17852276U JP 17852276 U JP17852276 U JP 17852276U JP S5440452 Y2 JPS5440452 Y2 JP S5440452Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17852276U JPS5440452Y2 (en]) | 1976-12-29 | 1976-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17852276U JPS5440452Y2 (en]) | 1976-12-29 | 1976-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5394943U JPS5394943U (en]) | 1978-08-02 |
| JPS5440452Y2 true JPS5440452Y2 (en]) | 1979-11-28 |
Family
ID=28785739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17852276U Expired JPS5440452Y2 (en]) | 1976-12-29 | 1976-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5440452Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6885205B2 (ja) * | 2017-06-12 | 2021-06-09 | 株式会社豊田中央研究所 | 金属蒸気供給装置、金属／金属化合物製造装置、金属窒化物単結晶の製造方法、及びナノ粒子の製造方法 |
-
1976
- 1976-12-29 JP JP17852276U patent/JPS5440452Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5394943U (en]) | 1978-08-02 |